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Semiconductor device fabrication

MOSFET scaling (process nodes)
020 μm – 1968 010 μm – 1971 006 μm – 1974 003 μm – 1977 1.5 μm – 1981 001 μm – 1984 800 nm – 1987 600 nm – 1990 350 nm – 1993 250 nm – 1996 180 nm – 1999 130 nm – 2001 090 nm – 2003 065 nm – 2005 045 nm – 2007 032 nm – 2009 028 nm – 2010 022 nm – 2012 014 nm – 2014 010 nm – 2016 007 nm – 2018 005 nm – 2020 003 nm – 2022
Future 002 nm ~ 2025
Half-nodes Density CMOS Device (multi-gate) Moore's law Transistor count Semiconductor Industry Nanoelectronics
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The "28 nm" lithography process is a half-node semiconductor manufacturing process based on a die shrink of the "32 nm" lithography process.^[1] It appeared in production in 2010.^[2]

Since at least 1997, "process nodes" have been named purely on a marketing basis, and have no direct relation to the dimensions on the integrated circuit;^[3] neither gate length, metal pitch or gate pitch on a "28nm" device is twenty-eight nanometers.^[4]^[5]^[6]^[7]

Taiwan Semiconductor Manufacturing Company has offered "28 nm" production using high-K metal gate process technology.^[8]

GlobalFoundries offers a "28nm" foundry process called the "28SLPe" ("28nm Super Low Power") foundry process, which uses high-K metal gate technology.^[9]

Design

"28nm" requires twice the number of design rules for ensuring reliability in manufacturing as "80nm".^[10]

Shipped devices

This section needs to be updated. Please help update this article to reflect recent events or newly available information. (April 2024)

AMD's Radeon HD 7970 uses a graphics processing unit manufactured using a "28nm" process.^[11]

Some models of the PS3 use a RSX 'Reality Synthesizer' chip manufactured using a "28nm" process.^[12]

FPGAs produced with "28 nm" process technology include models of the Xilinx Artix 7 FPGAs and Altera Cyclone V FPGAs.^[13]

References

^ Torres, J. Andres; Otto, Oberdan; Pikus, Fedor G. (2009-10-01). Zurbrick, Larry S.; Montgomery, M. Warren (eds.). Challenges for the 28nm half node: Is the optical shrink dead?. Society of Photographic Instrumentation Engineers. pp. 74882A. doi:10.1117/12.831047.
^ "A Review of TSMC 28 nm Process Technology | TechInsights". www.techinsights.com. Retrieved 2024-03-01.
^ "No More Nanometers – EEJournal". July 23, 2020.
^ Shukla, Priyank. "A Brief History of Process Node Evolution". design-reuse.com. Retrieved 2019-07-09.
^ Hruska, Joel. "14nm, 7nm, 5nm: How low can CMOS go? It depends if you ask the engineers or the economists..." ExtremeTech.
^ "Exclusive: Is Intel Really Starting To Lose Its Process Lead? 7nm Node Slated For Release in 2022". wccftech.com. 2016-09-10.
^ "Life at 10nm. (Or is it 7nm?) And 3nm - Views on Advanced Silicon Platforms". eejournal.com. 2018-03-12.
^ Clarke, Peter (2009-08-24). "TSMC splits 28-nm high-k metal gate process into two versions". EE Times.
^ "GlobalFoundries 130, 55, 45, 40, 28, 22, 12nm Prototyping and Volume Production" (PDF).
^ Balasinski, Artur (2014). Design for manufacturability: from 1D to 4D for 90-22nm technology nodes. New York, New York: Springer. p. 124. ISBN 978-1-4614-1761-3.
^ Smith, Ryan. "AMD Radeon HD 7970 Review: 28nm And Graphics Core Next, Together As One". www.anandtech.com. Retrieved 2024-03-01.
^ "NVIDIA RSX-28nm".
^ Homulle, Harald; Charbon, Edoardo (2017-12-13). "Performance characterization of Altera and Xilinx 28 nm FPGAs at cryogenic temperatures". 2017 International Conference on Field Programmable Technology (ICFPT). IEEE. pp. 25–31. doi:10.1109/FPT.2017.8280117. ISBN 978-1-5386-2656-6.

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